Siliconoxide相关论文
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Room temperature silicon oxide deposition by neutral beam assisted high density inductive coupled pl
A novel room temperature deposition process for silicon oxide (SiOx) thin films was developed using neutral beam assiste......
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Advanced PECVD for High Performance TFT Qunhua Wang, Young Jin Choi, Beom Soo Park, Dong Kil Yim, La
Displays in mobile phones, tablets and TVs are moving into higher mobility TFT for better performance. LTPS (low-tempera......
